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Thin Film Spectroscopic Reflectometer Print
Model No: HO-HAI-TFR-01SP
Thin Film Spectroscopic Reflectometer is a fundamental instrument used for thin film thickness analysis for industry & research. Holmarc’s TFSR Model No: HO-HAI-TFR-01SP is able to analyze thin film’s thickness, complex refractive index & surface roughness with high speed & repeatability. TFSR theory works with complex matrix form of Fresnel equations for reflectance & transmittance. Absolute reflectance spectroscopy is the principle behind Reflectometer; which is the ratio of the intensity of

the reflected light beam (usually monochromatic) to the intensity of the incident beam. Light beam which normally incidents on the sample surface in turn reflect from top & bottom of the thin film surfaces which get interfere & is directed through Optical fiber to CCD attached spectrometer via computer. On the monitor we get spectrogram with interference oscillations directly proportional to thin film thickness.

Holmarc’s Reflectometer can be used to analyze single, multi-layer, free standing & rough layer thickness of various stacks such as di-electric, crystalline, amorphous, metallic & absorbing samples. It also finds absolute transmittance & absorption directly. Roughness treatment is done with EMA modeling.

Features :
Analyze single and multi-layer films
Fiber optic probe for reflectance measurement at normal incident angle
CCD linear array image sensor for simultaneous measurement of reflectance at each wavelength
User extendable materials library
Data can be saved as an Excel or text file
Advanced mathematical fitting algorithm
FFT based thickness measurement
Extraction of thickness and optical constants
Parameterized models
    Film Thickness range : 25 nm - 1 μm
    Reflectance Wavelength range : 400 nm - 900 nm
    Transmittance / Absorbance range : 0 - 100%
    Light source : Tungsten Halogen Quartz Lamp, 50W
    Detector : CCD linear array, 3648 pixels
    Spectrometer : Spectra CDS 215
    Spectrometer wavelength range : VIS - NIR
    Precision typically for SiO2 on NSF - 66 : ± 5 nm
    Accuracy for same sample : ± 10 nm
    Optical Power : 20 W
    Light spot size : 1 mm
    Spot size on sample : 5 mm
    Optical fiber : Multimode Bi-furcated fiber with SMA fiber coupler
    Reference Sample : Enhanced silver with Yttrium & Bare Aluminum
    Standard Sample : SiO2 thin film on NSF - 66 Substrate
    Measuring modes : Curve fitting / Regression Algorithms,
FFT, FFT + Curve Fit
    Dispersion formulas : Cauchy’s, Sellmeiers, FFT & Empirical Models
    EMA models : Linear EMA, Bruggemann,
Maxwell Garnett, Lorentz - Lorenz models
    Material Library : Extendable Material user library
    PC Interface : RS232 / USB
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