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Variable Angle Laser Ellipsometer Print
Model No: HO-ED-P-06
Ellipsometry is a very sensitive optical technique which provides unequaled capabilities for thin film metrology. Ellipsometry exploits phase information and polarization state of light and so can achieve angstrom level resolution. The main advantages of ellipsometry are its non-destructive character, high sensitivity and wide measurement range. The optical parameters like thickness and refractive indices of a thin film can be determined precisely by this technique.

In the ellipsometer model no: HO-ED-P-06, an elliptically polarized light is made incident on the test substrate and the reflected light which is linearly polarized is analyzed for polarization changes.

The instrument consists of two concentrically rotating arms around a precisely graduated disc fixed to a heavy base. A laser source is held on one arm and the detector assembly on the other arm. The graduated disc has 1° scale and 0.1° resolution achieved through a vernier. Power supplies for laser source and detector are placed separately. Polarizer, analyzer and quarter waveplate are held in precision rotary stages in the optical path with precise graduations having 0-360° range and 0.1° resolution.

 

Measurement Range : 1 nm ~ 300 nm
Incident Angle : 30° ~ 90°, Error ≤ 0.1°

Rotation Range
Polarizer : 0° ~ 360°
Quarter-Wave : 0° ~ 360°
Resolution : 0.1 degree

Laser
Type: DPSS
Wavelength: 532nm
Output Power : 5mW

Laser Arm
Rotation range : 70 degrees (from horizontal plane)
Main scale division : 1 degree
Resolution : 0.1 degree

Detector
Type : Si Photodiode with 5.8 x 5.8mm active area

Detector Arm
Rotation Range : 70 degrees (from horizontal plane)
Main scale division : 1 degree
Resolution : 0.1 degree

Sample holder
Height adjustment range : 10mm
Drive resolution : 10 microns
tilting range : +/- 2 degree

Glan-Thompson Prisms are used for both polarizer and analyzer. Sample is placed on a precision micrometer driven vertical stage with height adjustment range of 10 mm and resolution 0.01 mm. Incident angle for laser source can be adjusted between 30 and 90 . For null method, detector can be replaced with a miniature screen for visual determination of null point, if required.

As shown in the Fig., randomly polarized laser light (532nm) passes through a polarizer which changes the polarization of light from random polarization to

linear polarization. The linearly polarized light then passes through a quarter-wave plate (set the fast axis at 45 degree) which changes the polarization state from linear to elliptical. After reflection from the sample thin film, the elliptically polarized light becomes linearly polarized and an analyzer measures the degree of polarization.
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