| High frequency micro manipulator - left/right = 2 Nos |
| 100 TPI XYZ drive |
| True linear motion, Fine XYZ controls |
| Fine controls are in-line and easily accessible from the rear of the manipulator |
| Travel range (X / Y / Z) = 0.5” x 0.5” x 0.5” |
| Suitable for geometries > 1 microns |
| Precision of XYZ stages = 10 microns |
| Magnetic base |
| Straight configuration for left / right manipulator placement |
| Support different RF probe heads (GSG, GS, SG) |
| Planarity (Roll) adjustment range = +/- 5 degree |
| Planarity (Roll) adjustment resolution = 0.005 degree per degree rotation |
| Theta (Yaw) adjustment range = +/- 5 degree |
| Theta (Yaw) adjustment resolution = 0.005 degree per degree rotation |
| Microwave head adapter (Customer has to provide details of Microwave probe. Microwave probe is not in the scope of supply) |
| 1. LWD Plan Apo 50X microscope objective |
| NA = 0.50 |
| Working distance = 17 mm |
| FOV eyepiece = 0.4 mm |
| FOV camera = 0.114 mm x 0.0856 mm |
| Resolution = 0.6 microns |
| Price = $ 2145.00 |
| 2. LWD Plan Apo 20X microscope objective |
| NA = 0.35 |
| Working distance = 29 mm |
| FOV eyepiece = 1 mm |
| FOV camera = 0.285 mm x 0.214 mm |
| Resolution = 1 microns |
| Price = $ 1358.00 |
| XYZ sample stage with Thermal - Vacuum chuck |
| Sample stage top plate = 50 mm x 50 mm |
| X axis travel = 25 mm |
| YZ axis travel = 10 mm each |
| XYZ axis drive = 100 TPI leadscrew |
| 25.4 mm Z axis range via platen lift |
| Temperature range = RT - 250ºC |
| Cooling - Thermo electric cooling in conjunction with chiller for water cooling |
| Cooling below ambient about -10ºC or closer to it |
| Temperature increment step = 1 degree |
| Cables and Probes should be thermally insulated |
| Vacuum pump |
| Manual and software control required for temperature and vacuum pump |
| Probe station Trinocular microscope |
| Probe station Trinocular microscope and its support stand = 1 set |
| Optical system = Infinity corrected |
| Observation Method = bright field |
| Illumination = Reflected (Co-axial and Angled) |
| Illumination system = High bright white LEDs , Intensity adjustable via software |
| Nosepiece = revolving, quadruple with positive precision click stops |
| Viewing head = Siedentopf Trinocular head, 30 degree |
| IP adjustment = 48 - 75 mm |
| Eyepiece= 10X Wide field eyepiece, FN = 20mm, dioptre adjustable |
| Focusing = Manual |
| Camera Specifications |
| Optical format = 1/2.5” CMOS |
| Active imager size = 5.70mm x 4.28mm, 7.13mm diagonal |
| Active pixels : 2592 x 1944 (5Mp) |
| Pixel size : 2.2 x 2.2 um |
| Color filter array : RGB Bayer pattern |
| Shutter type : Electronic rolling shutter(ERS) |
| Frame rate : Full resolution -up to8fps, VGA -upto 70 fps |
| ADC resolution : 12- bit, on-chip |
| Pixel dynamic range : 70.1 dB |
| Operating temperature : -30°C to +70°C |
| Power consumption : 381mW at 15 fps full resolution |
| Interface : USB2.0 |
| Microscope Objectives |
| 1. LWD Plan Acrhomatic 2X
(NA = 0.08, WD = 65 mm,
Resolution = 3.5microns, FOV eyepiece = 10 mm, FOV camera = 2.85 mm x 2.14 mm) |
| 2. LWD Plan Apo 5X
(NA = 0.14, WD = 40 mm,
Resolution = 2.3 microns, FOV eyepiece = 4 mm, FOV camera = 1.14 mm x 0.856 mm) |
| 3. LWD Plan Apo 10X
(NA = 0.30, WD = 34 mm,
Resolution = 1 microns, FOV eyepiece = 2 mm, FOV camera = 0.57 mm x 0.428 mm) |
| Manipulator supporting Platform (magnetic SS)
Base plate, Manual XYZ stage for microscope = 1 set |
| Software = Image grabbing as well as temperature & vacuum controls |
| External magnetic field
An external magnetic field of 0.4 Tesla at a pole gap of 10 mm. Permanent magnets with pole gap adjustable mechanical mount. Dia. 30 mm x 20 mm Length permanent magnets. Adjustable pole gap = 0 - 20 mm. |
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