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Variable Angle Spectroscopic Ellipsometer

Model No: HO-SE-01XY

Spectroscopic Ellipsometer is a non-contact instrument widely used for thin film analysis and measurements. Holmarc’s Spectroscopic Ellipsometer model HO-SE-01 incorporates Rotating Analyzer Ellipsometry(RAE) technology to characterize thin film samples. It uses a high speed CCD array detector to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient.

HO-SE-01 model is equipped with a 50W Halogen lamp as the light source. A set of motorized rotatable Glan-Thompson polarizers are used as the Polarizer and the Analyser. A motorized Z stage is provided for the automatic focusing of sample and a manual tilting platform is provided for the sample alignment. A motorized XY stage with 30 mm x 30 mm travel is also provided for positioning the sample for measurement at different locations. An optical fiber with SMA connector is used to couple the reflected light from the sample to the spectrometer.

A user-friendly measurement software is provided for the initial calibration and automatic measurements. An analysis software with advanced mathematical fitting algorithm is provided for the deduction of thickness and optical properties from the measured data..

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    Spectral Range  :  450 - 800 nm
    Ellipsometer configuration  :  RAE
    Detector  :  3648 pixel CCD linear sensor
    Spectral resolution  :  1 nm
    Light Source  :  Halogen
    Incident angle  :  50 - 75 degree (Resolution 0.1 degree, Automated operation)
    Thickness measurement range  :  20 nm - 10 microns
    Accuracy  :  +/- 3 %
    Resolution of measured R.I  :  0.001
    Sample thickness  :  0.3 mm - 8 mm
    Sample XY Stage travel  :  30 mm x 30 mm (motorized)
    Sample focusing  :  Automated
    Sample alignment  :  Manual tilt
    Sample measurement  :  automatic
    Thickness analysis  :  Advanced mathematical fitting algorithms

    Advanced mathematical fitting algorithm
    Selection of different optical models
    User extendable optical models
    Data can be save as Excel or text files
    Dedicated software for analysis
    Automated operation
    Automatic sample focusing

Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer

Principle of Ellipsometry


Ellipsometry is a highly sensitive optical measurement technique for optical thin films. The principle relies on the analysis of the change in the polarization state of light reflected from a surface. The change in the polarization of light reflected from the thin film surface is measured by taking the amplitude ratio of two perpendicularly polarized beams.

p  =  rp / rs  =  tan Ψe

Where Ψ and Δ are the amplitude ratio and phase shift of the p and s components respectively. Since ellipsometry is measuring the ratio of two values, it is very accurate and reproducible.

Ellipsometric Solutions

Need Customization for measurements. HOLMARC's experienced support engineers will be glad to help you.
Call us at +91 938-863-2098 or send us a mail to sales@holmarc.com

Holmarc can provide custom spectroscopic ellipsometers to fit a wide variety of applications.



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