| Spectral range = 375 nm - 1700 nm |
| Ellipsometer type = Rotating analyser |
| Incident angle = Adjustable from 50 - 75 degree, fully Automated (0.1 degree resolution) |
| Thickness measurement range = 10 nm - 10 micron |
| Resolution of film thickness = 0.01 nm |
| Resolution of measured RI = 0.001 |
| Sample XYZ stage = 25 mm x 25 mm x 10 mm travel with tilting platform (Automated operation can be provided) |
| Light source = 100 W halogen lamp with adjustable power supply (control via software) |
| Monochromator - source arm coupling = Fiber |
| Monochromator : |
| Optical layout : Czerny - Turner |
| Focal length : 200 mm |
| Grating mount : Dual grating turret |
| Number of gratings : 2 (1200 l/mm holographic grating & 600l/mm precision ruled diffraction grating) |
| Grating size : 50 x 50 mm |
| Aperture ratio : f / 3.5 |
| Number of entrance / exit ports : 1 |
| Mechanical resolution drive : 0.000072° / step |
| Slit type : Micrometer |
| Slit width : 10 μm - 2 mm |
| Slit height : 12 mm |
| Higher-order cut-off filter : Yes, Motorized (Selection can be controlled through PC) |
| Higher-order filter size : 12.5 mm |
| Fiber optic coupler plate : Yes |
| Linear dispersion : 2.25 nm / mm |
| Wavelength accuracy : ± 0.15 nm |
| Resolution @ 25μm Slit width & 1200 l / mm Configuration : 0.1 nm |
| Input coupling optics : Yes, NA matched fused silica focusing lens |
| Output coupling optics : Yes, NA matched fused silica collection lens for 10 x 10 mm area detector |
| Computer interface : USB 2.0 |
| Trigger IN / OUT : Yes |
| Software control : Windows - based software is used to control all spectrometer functions and detector readings |
| Dual detector Auto selection control and measurement Module |
| Detector 1 : High-sensitive Si photodiode Detector |
| Active Area : 5.8 x 5.8 mm |
| Peak Sensitivity wavelength : 960 nm |
| Dark Current ID VR = 10mV Max : 5pA |
| Detector 2 : InGaAs Photodiode control and measurement Module |
| Type : InGaAs Photodiode |
| Responsivity @ 1310 nm (A/W) : 0.8 minimum / 0.9 typical |
| Responsivity @ 1550 nm (A/W) : 0.9 minimum / 0.95 typical |
| Active Area Diameter (mm) : 3.0 |
| DAC : 16 Bit |
| Sampling rate : 200 reading / second |
Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer
| 1. Constant Value Model |
| 2. Entered Value Model |
| 3. Cauchy’s Coefficients Model |
| 4. Sellmeier’s Coefficients Model |
| 5. Combination of Cauchy & Sellmier Model |
| 6. Drude Model |
| 7. Lorentz - Drude Model |
| 8. Brendel - Bormann Model |
| 9. Adachi Model |
| 10. Cauchy Lorentz Model |
| 11. Amorphous Dispersion Model |
| 12. Cauchy Absorption Model |
| 13. Sellmeier Lorentz Drude Model |
| 14. Cauchy Urbach Model |
| Surface roughness Models : - (Effective Medium Theories) |
| 1. Lorentz - Lorentz |
| 2. Bruggeman EMA |
| 3. Linear EMA |
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