Rotary stage giving C movement will be mounted on the rotary stage giving A movement. Rotary stage (giving A movement) will be mounted on Z stage. Z stage will be mounted perpendicularly on Y-stage and Y stage will be further mounted on X stage. Therefore, all the stages should be able to carry the total weight of the work stations which are mounted above it along with a working load of 5 Kg (max). These stages are modular in design and construction.
# controller sold separately [ read more + ]
Model No | HO-XYZCA-100-ZZ | HO-XYZCA-100-SM |
Drive | AC servo motor | Stepper motor |
Absolute positioning accuracy | ||
Linear stages (XYZ) | 10 μm | |
Theta stage | 0.05 degree | |
Repeatability | ||
Linear stage (XYZ) | 5 μm | |
Theta stage | 0.05 degree | |
Straight line accuracy | Linear stage (XYZ) 10 μm | |
Construction | Aluminum alloy on any rust free | |
Finish | Black anodized | |
Travel | ||
Linear stage X Axis | 100 mm | |
Linear stage Y Axis | 100 mm | |
Linear stage Z Axis | 50 mm | |
Theta stage C axis | +/- 60 degree | |
Theta stage A axis | 360 degree | |
Feedback | ||
Linear stage | Optional fitting on request | |
Theta stage | Optional fitting on request | |
Resolution | ||
Linear stages | 0.2 μm (1/10000 step) | 0.3125 μm (1/10000 step) |
Theta stage | 0.01 degree (1/10000 step) | |
Linear guide and Rotary stage bearing system |
Precision V guidway and roller | |
Double bearing system including preloaded roller thrust bearing | ||
Drive mechanism | ||
Linear stage (XY Stage) | Ground leadscrew , Pitch 2 mm | |
Theta stage | Precision worm gear and shaft assembly | |
Speed | ||
Minimum speed | Linear stages (XYZ Stage) : 300 micron / min | |
Theta stage : 8 degree / sec | ||
Maximum speed | Linear stages (XY Stage) : 1000 mm / min | Linear stages (XY Stage) : 480 mm / min |
Theta stage : 8 degree / sec | ||
Limit switchs | ||
Linear stages | Optical limit switch in both ends | |
Theta stage | Optical home sensing limit switch | |
Pay-Load | 5 kg | |
Mounting Holes | M6 Mounting holes |
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