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Vacuum Compatible

Motorized 5 Axis Stage


Model: HO-MXYZCA-50VC
Vacuum Compatibility : ≤1 x 10-6 mbar
Aluminium alloy Construction

# controller sold separately    [ read more + ]


Parameters Linear Stage Rotational Stage
Vacuum Compatibility ≤1 x 10-6 mbar
Construction (Material) Aluminum Alloy
Finish Without Anodizing (Desirable for Vacuum)
Actuator Stepper Motor
Absolute positioning accuracy 2.5 μm ± 0.25 μm 0.2 degree ± 0.02 degree
Repeatability ± 0.20 mm ± 0.1 degree
Straight line accuracy ± 25 μm ..........
Wobble 0.02 mm 0.02 mm
Travel (X,Y & Z) :  50 mm 360 degree
Resolution 2.5 μm (Half Step) 0.01 degree (half step)
Drive Ground leadscrew, pitch 1mm Precision worm gear and shaft assembly
Maximum speed Linear stages (XY Stage) : 4 mm / sec (4 rps) 4 rps
Limit switches Optical Limit switch in both ends Optical home sensing limit switch
Pay-Load 2  Kg

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